Vacuum treatment apparatus and a method for manufacturing

摘要

A vacuum treatment apparatus and method for manufacturing has a plurality of treatment chambers for treating workpieces, in particular silicon wafers, a transfer chamber attached to the treatment chambers communicating via respective openings and having handling zones located adjacent to each of the treatment chambers. A workpiece carrier is arranged within the transfer chamber and configured to transfer the workpieces between the handling zones, and one or more handlers for moving the workpieces between the handling zones and the treatment chambers. The transfer chamber is ring-shaped about an axis and the openings have opening substantially parallel thereto. This way, forces on the transfer chamber are redirected to a large support structure and thus, a cost-effective, light and still rigid mechanical construction can be achieved.

主权项

1. A vacuum treatment apparatus comprising:
a plurality of treatment chambers (18,19) for treating workpieces, a transfer chamber (15) being attached to the treatment chambers (18,19) communicating via respective openings with said transfer chamber (15) and comprising handling zones located adjacent to each of the treatment chambers (18,19), a workpiece carrier arranged within the transfer chamber (15) configured to transfer the workpieces between the handling zones, and one or more handlers for lifting the workpieces between the handling zones and the treatment chambers (18,19),wherein the transfer chamber (15) comprises a through hole that provides an open space.