Temperature control device and oscillator

摘要

A temperature control device includes a temperature detector, a difference operation unit, a controller, a saturation processing circuit unit, a rewritable storage unit, and a conversion unit. The difference operation unit operates a digital value corresponding to a difference value between a detected temperature value and a target temperature. The controller calculates a manipulated variable using the digital value operated by the difference operation unit. The saturation processing circuit unit includes a digital circuit to limit an output value of the controller to a pre-set upper limit value. The rewritable storage unit stores the upper limit value read from a storage area of the rewritable storage unit and input into the saturation processing circuit unit. The conversion unit converts the output value of the saturation processing circuit unit into an analog signal to output the converted value as a control command value to the heater.

主权项

1. A temperature control device for controlling a temperature of a heated body heated by a heater to a target temperature, the temperature control device comprising:
a temperature detector that detects a temperature corresponding to the heated body; a difference operation unit that operates a digital value corresponding to a difference value between a detected temperature value detected by the temperature detector, and the target temperature; a controller that calculates a manipulated variable using the digital value operated by the difference operation unit as an input value and outputs the manipulated variable as the digital value; a saturation processing circuit unit that being connected to a rear stage of the controller and including a digital circuit to limit an output value of the controller to a pre-set upper limit value; a rewritable storage unit that stores the upper limit value, and the upper limit value being read from a storage area of the rewritable storage unit and being input into the saturation processing circuit unit; and a conversion unit that converts the output value of the saturation processing circuit unit into an analog signal to output the converted value as a control command value to the heater.