Unequal link SCARA arm

摘要

A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint. A proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint. The substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint. The upper arm and the forearm being unequal in length from joint center to joint center. The substrate transport arm is adapted to transport substrate to and from at least two substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the holding areas. Each of the upper arm, forearm and substrate holder being independently rotatable with respect to each other.

主权项

1. A method of transporting a substrate comprising:
providing a substrate transport apparatus with a drive section having a frame and a first, second and third drives; providing an arm assembly having an independently rotatable upper arm and an independently rotatable forearm and an independently rotatable substrate holder for holding the substrate, the upper arm and forearm being of unequal length from joint center to joint center and rotatably joined to each other at a distal end of the upper arm, the upper arm being rotatably mounted to the frame at an opposite end, the substrate holder being rotatably joined to a distal end of the forearm at a wrist joint; and energizing the first, second and third drives for effecting individual rotation of each of the upper arm, forearm and substrate holder, the individual rotation of each of the upper arm, forearm and substrate holder effecting movement of the substrate on the substrate holder along a radial line for transporting the substrate to and from a substrate holding area, the radial line being substantially perpendicular to the substrate holding area; wherein the substrate holder rotates about a center of the substrate during radial movement of the substrate and relative rotation between the unequal length upper arm and forearm changes direction during extension to effect motion along the radial line.