METHOD FOR GENERATING PATTERN, STORAGE MEDIUM, AND INFORMATION PROCESSING APPARATUS

摘要

A method for generating a pattern includes: a step of defining the occupation region of a main pattern in each cell; a step of arranging in parallel a first cell and a second cell which has an auxiliary pattern outside the occupation region of the main pattern, which is a step of arranging in parallel the first and the second cell which are arranged in a manner that an auxiliary pattern outside the occupation region of the second cell is in the occupation region of the main pattern of the first cell; and a step of generating the pattern of a mask by removing the pattern element of the auxiliary pattern in a part where the pattern element of the auxiliary pattern outside the occupation region of the second cell is adjacent to or overlapped with the main pattern in the first cell of the first cell and the second cell arranged side by side.