| 摘要 |
PROBLEM TO BE SOLVED: To provide a head-on type excimer lamp for which a plurality of objects can be juxtaposed in the state where light extraction parts are densely arranged side by side, and an excimer light irradiation device capable of irradiating an irradiation area over a wide area with light having high in-plane illuminance uniformity.SOLUTION: The excimer lamp includes a discharge container. In the discharge container, inside of an outer tube of which one end is closed by a light extraction window and the light extraction parts are formed in one end portion, an inner tube of which one end is closed is disposed along a tube axis of the outer tube in the state where an end wall closing the one end is positioned separately from the light extraction window in a tube axis direction and between the outer tube and the inner tube, a discharge space in which a discharging gas is encapsulated is formed. An outer peripheral contour of the light extraction parts in the outer tube is formed so as to be planarly filled. In the excimer light irradiation device, a plurality of excimer lamps are disposed in the state where the light extraction parts of excimer lamps neighboring to each other are planarly filled.SELECTED DRAWING: Figure 1 |
