| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for preventing partial melting and structural damage of a silicon core wire caused by spark generation and the like when depositing polycrystal silicon on the silicon core wire by a CVD method.SOLUTION: A core wire holder 34 (a holding member) has such taper that a lower end part thereof forms a plus taper angle. Meanwhile, an inner face of a hole part, into which the lower end part of the core wire holder 34 (the holding member) is inserted, of an adapter 33 (a supporting member) used for connecting a metal electrode 30 for electrifying a core wire 100 with the core wire holder 34 (the holding member) has such taper that the taper angle is plus when an open side of the hole part is upward and a direction for inserting the lower end part of the holding member is downward. The lower end part of the core wire holder 34 (the holding member) is inserted into the hole part of the adapter 33 (the supporting member) to fix the silicon core wire 100.SELECTED DRAWING: Figure 3 |
