VARIABLE SHAPE MIRROR AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a technology that attains a variable shape mirror with a relatively-easy-to-manufacture structure that can be displaced in two directions vertical to a mirror-reference surface.SOLUTION: A variable shape mirror 100 comprises: a mirror base member 111 that has a reflection surface 110; and an actuator 101 that includes a first actuator and a second actuator. Each of a plurality of actuators is connected to the mirror base member via a connection part 121. A first actuator has a pair of first electrodes 104 and 105 of a comb-like electrode structure that displaces the connection part in a first direction vertical to the reflection surface, and a second actuator has a pair of second electrodes 108 and 109 of the comb-like electrode structure that is formed separately from the pair of first electrodes, and displaces the connection part in an opposite second direction of the first direction.SELECTED DRAWING: Figure 1