QUANTITATIVE ANALYSIS SYSTEM AND QUANTITATIVE ANALYSIS METHOD OF HALOGEN AND SULFUR

摘要

PROBLEM TO BE SOLVED: To provide a quantitative analysis system detecting impurities of low concentration in a sample with high sensitivity.SOLUTION: A quantitative analysis system of this invention includes a meter for weighting a sample, and an analysis device for quantitating an element contained in the weighted sample. The analysis device has a sample input unit for inputting the sample. The quantitative analysis system includes a clean booth surrounding one or both of the sample input unit and the meter, and a clean air supply unit for supplying into the clean booth a gas in which a contamination component and fine powder are removed.SELECTED DRAWING: Figure 1