| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate housing container for use in a semiconductor factory which allows for stable supporting of a substrate even if impact or vibration is applied to the container, in a substrate housing container for housing and supporting a substrate, e.g., a bonded wafer.SOLUTION: In a substrate housing container consisting of a container body capable of housing a substrate and a lid, the lid has a retainer for supporting the edge of the substrate. The substrate housing container is configured so that the normal direction of a plane of the retainer, against which the substrate abuts, inclines by a predetermined angle, with reference to the substrate horizontal rear direction 803, i.e., the rear direction of the substrate housing container passing through the center of the substrate in the thickness direction and perpendicular to the thickness direction of the substrate, when the lid closes the container body and supports the substrate.SELECTED DRAWING: Figure 8A |
