| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical filter whose wire grid pattern having a high aspect ratio and a wire grid protection layer that shows little deterioration in optical properties are formed simultaneously, and which offers superior performance and reliability.SOLUTION: An optical filter 205 includes a transparent substrate 20 that is transparent to light of a band in use, and a polarizing filter layer 16 that is formed on the transparent substrate 20 and has a plurality of polarizer patterns 10 having different transmission/polarization axes. Each polarizer pattern 10 contains metallic material and has a top surface covered with an oxidized layer 12 made of an oxide of the metallic material and an SiOlayer 13, in the described order, and side surfaces covered with the oxidized layer 12 made of the oxide of the metal material.SELECTED DRAWING: Figure 6 |
