PRODUCTION METHOD OF MONOHALOSILANE

摘要

PROBLEM TO BE SOLVED: To provide a novel production method of a monohalosilane, especially a production method of a monohalosilane having a high yield and selectivity.SOLUTION: A monohalosilane is produced at a high yield and selectivity by a reaction where silane gas is brought into contact with a copper halide (II) while regulating by-production of a dihalosilane. When the copper halide is degraded in activity, it can be reactivated by halogenation for reuse. The reaction does not use a corrosive gas such as hydrogen chloride (HCl) gas and thus dispenses with a special piping material in a reaction apparatus resulting in a low production cost or the like.SELECTED DRAWING: Figure 3