| 摘要 |
PROBLEM TO BE SOLVED: To maintain processing accuracy by means of a laser beam while suppressing the rise of a manufacturing cost.SOLUTION: A laser processing device includes lens determination means (3) which performs quality determination of a condenser lens, and the lens determination means is constituted of a standard table (33), an inspection light emission part (31) which emits inspection light for inspecting the condenser lens (23), a half mirror (32) which divides inspection light emitted from the inspection light emission part and an image taking part (36) having an image taking element (361) which receives a first inspection light divided by a half mirror and reflected by a first planar mirror (34) on the standard table and performs the image taking and a determination part (37) which causes the condenser lens to transit a second inspection light divided by the half mirror, causes the image taking element to receive the second inspection light reflected by a second planar mirror (35) on a processing table and performs quality determination of the condenser lens according to an interference fringe image by means of the first inspection light and the second inspection light received by the image taking element.SELECTED DRAWING: Figure 1 |
