| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor element that exhibits high sensitivity even when it is downsized, and a sensor device, electronic equipment, and a mobile object each equipped with the sensor element and having high reliability.SOLUTION: The sensor element has: a base part 21; vibration arms for detection 23, 24 extending to both sides along the direction of the axis y from the base part 21; coupling arms 211, 212 extending to both sides along the direction of the axis x from the base part 21; vibration arms for drive 25, 26 extending to both sides along the direction of the axis y from the first coupling arm 211; vibration arms for drive 27, 28 extending to both sides along the direction of the axis y from the second coupling arm 212; support parts 221, 222 juxtaposed across the vibration arms for drive 25-28 in the direction of the axis y; first beam parts 223, 224 for coupling the first support part 221 and the base part 21; and second beam parts 225, 226 for coupling the second support part 222 and the base part 21, the first support part 221 being provided with a defective part 221c which a portion of the first vibration arm for detection 23 gets into.SELECTED DRAWING: Figure 3 |
