| 摘要 |
PROBLEM TO BE SOLVED: To provide a cooling device where the object to be treated is immersed into a coolant, thus is cooled, in which the object to be treated is uniformly cooled and the further improvement of the quality of the object to be treated.SOLUTION: Provided is a cooling device comprising: a liquid tank storing a coolant and further provided with the mounting region of the object to be treated at the inside; a propeller arranged at the inside of the liquid tank and further pressure-feeding the coolant; and a duct of guiding the coolant from the propeller to the lower part of the mounting region, and further comprising a guide plate provided at the inside of the duct and guiding the coolant flowing the inside of the duct toward the corner parts of the bottom part in the mounting region.SELECTED DRAWING: Figure 1 |
