A WAFER SIZE CONVERSION TOOL

摘要

The present invention relates to a wafer size conversion device, in a semiconductor process equipment, a measuring equipment, or the like, which converts a small-caliber wafer to a big-caliber wafer to be able to treat at least two different size types of wafers in one equipment. According to the invention, the wafer size conversion device comprises: an inner peripheral part forming a center hole on which a wafer of a first caliber to be placed; an outer peripheral part which has a second caliber bigger than the first caliber; an inner aligning part which is formed at the inner peripheral part to align a directionality with the wafer to be placed thereon; an outer aligning part which is formed at the outer peripheral part to display a directionality; a side support part which is formed on the inner peripheral part and supports a side of the wafer to be placed; and a separation prevention part to prevent separation in the front and the rear direction of the wafer to be placed.