| 摘要 |
PROBLEM TO BE SOLVED: To increase the amount of infrared rays entering an infrared sensor.SOLUTION: An infrared sensor has a substrate in which an open hole penetrating the interval between a surface on one side and a surface on the other side is formed, and an infrared absorption part formed on the surface side on one side of the substrate. In the infrared sensor, the infrared absorption part is positioned on the open hole, and an antireflection film is formed on the side wall surface of the open hole.SELECTED DRAWING: Figure 1 |
