SUBSTRATE WITH FUNCTION OF MEASURING FILM THICKNESS AND METHOD FOR MEASURING THICKNESS OF INSULATING FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring the thickness of an insulating layer that can make a measurement in easy and non-destructive manners.SOLUTION: The method for measuring the thickness of an insulating layer includes the steps of: preparing a substrate 1 provided with an antenna PA having a first metal layer 21, a first insulating layer 41 on the first metal layer 21, and a second metal layer 22 on the first insulating layer 41 facing the metal layer 21; forming a second insulating layer 42 with a thickness to be measured on the second metal layer 22; and calculating the thickness of the second insulating layer 42 based on a measured resonance frequency of the antenna PA.SELECTED DRAWING: Figure 7