| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for manually correcting the tilt of a sample with ease.SOLUTION: A measuring microscope 100 includes a rotary stage 203, a XY stage 204, an operating unit 310, and a display control unit 320. The rotary state 203 has a rotary shaft parallel to an optical axis of an objective lens 201 and is rotated by manual operation. The XY stage 204 is a linear stage moving the rotary stage 203 into a specific direction perpendicular to the optical axis of the objective lens 201. The operating unit 310 calculates the tilt of a sample S with respect to a predetermined direction, and the display control unit 320 causes a display 400 to display information on the tilt of the sample S on the basis of the tilt calculated by the operating unit 310.SELECTED DRAWING: Figure 1 |
