METHOD OF MANUFACTURING MAGNETIC DEVICE

摘要

The present invention relates to a method for manufacturing a magnetic device. The method includes the following steps: forming a magnetic layer; forming a lower insulating layer on the magnetic layer by using a first gas, which is an inert gas having a higher atomic weight than argon (Ar); and forming an upper insulating layer on the lower insulating layer by using the Ar. Therefore, the method for manufacturing a magnetic device can prevent magnetic property deterioration caused in the process of forming the insulating layers within a magnetic device, and maintain reliability.