Systems, Devices, and Methods for Calibration of Beam Profilers

摘要

Embodiments generally describe systems, devices, and methods for focusing and calibrating beam profilers. A test object is provided that may include an internal housing rotatable within an external housing. The internal housing may house a light source, a collimator, a filter, and/or a diffuser. A plate may be mounted to the internal housing and may include a plurality of markings. In some embodiments, to focus a beam profiler, the test object may be positioned adjacent the converter plate of a beam profiler. Marker images may be captured and a focus quality may be assessed therefrom. A position of the converter, objective, and/or camera of the beam profiler may be adjusted based on the focus quality. To calibrate, images of the markings in several rotational positions may be captured and used for calibration. The markings may be rotated to several positions by rotating the internal housing relative to the external housing.

主权项

1. A focusing or geometric calibration test object for a beam profiler comprising:
an external housing; an internal housing rotatably mounted within the external housing and rotatable relative to the external housing about an internal housing axis; a light source housed within the internal housing; a plate coupled with the internal housing and transverse to the internal housing axis; and a plurality of markings on the plate.