| 摘要 |
The invention provides a method of contacting integrated circuit components in a test system for testing integrated circuit components comprises the steps of providing an atmosphere comprising an inert gas; and contacting tips of a contactor of the test system with respective contacting areas of an integrated circuit component to be tested, the contacting being performed in the provided atmosphere comprising the inert gas. The invention further provides a test system for testing integrated circuit components that comprises means for providing an atmosphere comprising an inert gas; wherein the test system is configured to contact tips of a contactor of the test system with respective contacting areas of an integrated circuit component to be tested, and the test system is configured to perform the contacting in the provided atmosphere under operating conditions. |
