| 摘要 |
PROBLEM TO BE SOLVED: To obtain an electric machine conversion member which inhibits peeling of a lower electrode and achieves high reliability.SOLUTION: In a piezoelectric element 16, a lower electrode film for forming a lower electrode 161, a piezoelectric material film for forming a piezoelectric material 162, and an upper electrode film for forming an upper electrode 163 are formed on a diaphragm 15 formed on a substrate 14 in a lamination manner. Further, the lower electrode film, the piezoelectric material film, and the upper electrode film are patterned to form the lower electrode, the piezoelectric material, and the upper electrode into desired patterns. In an actuator substrate 30 including the piezoelectric element 16, corner parts of the lower electrode are formed into round shapes. |
