| 发明名称 |
TARGET ARRANGEMENT, PROCESSING APPARATUS THEREWITH AND MANUFACTURING METHOD THEREOF |
| 摘要 |
A target arrangement (100; 101; 102; 103; 104; 106) for a processing apparatus (105; 107) is described. The target arrangement includes a target support (110) configured for supporting a non-planar target material (120), wherein the target support (110) includes a vacuum side (130) and an atmospheric side (140). Further, a processing apparatus adapted for a target arrangement and a method for manufacturing a target arrangement are described. |
| 申请公布号 |
WO2016012038(A1) |
申请公布日期 |
2016.01.28 |
| 申请号 |
WO2014EP65739 |
申请日期 |
2014.07.22 |
| 申请人 |
APPLIED MATERIALS, INC.;SCHNAPPENBERGER, FRANK |
发明人 |
SCHNAPPENBERGER, FRANK |
| 分类号 |
C23C14/34;C23C14/56;H01J37/34 |
主分类号 |
C23C14/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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