发明名称 |
POINT DEFECT CONCENTRATION CALCULATION METHOD, GROWN-IN DEFECT CALCULATION METHOD, GROW-IN DEFECT IN-PLANE DISTRIBUTION CALCULATION METHOD, AND SILICON SINGLE CRYSTAL MANUFACTURING METHOD USING SAID METHODS |
摘要 |
PROBLEM TO BE SOLVED: To provide a point defect concentration calculation method capable of calculating a point defect concentration precisely for a short time; and a Grown-in defect calculation method capable of calculating the size of a Grown-in defect precisely for s short time; a Grown-in defect in-plane distribution calculation method capable of determining an accurate defect distribution simply; and a silicon single crystal production method utilizing the calculation results of those methods.SOLUTION: A point defect calculation method for calculating a point defect concentration in a silicon single crystal being raised is characterized in that the diffusion of a point defect is calculated by setting the diffusion parallel to a crystal growth axis and the diffusion in the crystal diameter direction individually as a diffusion of one dimension. |
申请公布号 |
JP2016013957(A) |
申请公布日期 |
2016.01.28 |
申请号 |
JP20140137908 |
申请日期 |
2014.07.03 |
申请人 |
SHIN ETSU HANDOTAI CO LTD |
发明人 |
HOSHI RYOJI;ONAI TAKAHIDE |
分类号 |
C30B29/06 |
主分类号 |
C30B29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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