| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal treatment device capable of reducing a number of components for sealing a penetrating part of a chamber.SOLUTION: On lifting pipes 31a and 31b penetrating stepped surfaces 15a and 15b of a chamber 11 and lifting an article supporting body 50, a through-hole penetrating in a vertical direction is formed. Power for heating a treated article 70 is supplied from the outside to a heater 52 through the through-hole. Therefore, the lifting pipes 31a and 31b for lifting the article supporting body 50 function as piping through which a lead wire for supplying the power passes. Bellows 35a and 35b connecting the penetrating part of the stepped surfaces 15a and 15b of the chamber and the lifting pipes 31a and 31b exist. |
