CONDITIONING SYSTEM AND LITHOGRAPHIC APPARATUS COMPRISING A CONDITIONING SYSTEM

摘要

Disclosed is a conditioning system (200) for a lithographic apparatus comprising a plurality of modules (215). The conditioning system comprises a common conditioning medium for the plurality of modules; a plurality of conditioning branches (220) conveying the conditioning medium, one for each module (or a subset of modules); a plurality of thermal actuators (225), each operable to locally alter the temperature of the common conditioning medium at one of the conditioning branches; and a plurality of sensors (230), each operable to sense the temperature of the common conditioning medium at one of the conditioning branches.