| 摘要 |
PROBLEM TO BE SOLVED: To remove an adhered material adhering to a surface of an object to be cleaned.SOLUTION: In an adhered material removing device, an accelerator 73 comprises: a pressure accumulating part 71 in which a pressurized gas is filled; a throttle part 73B for throttling an air flow discharged from the pressure accumulating part 71; an inflation part 73D for inflating an air flow jetting from a throat part 73C where a cross section of a flow channel is most contracted in the throttle part 73B; a valve part 73E for opening and closing the throat part 73C; and the like. The accelerator accelerates an air flow to more than a sonic velocity or to a subsonic velocity and jets the accelerated air flow toward the filter 3 object to be cleaned. |
