AUTO-FOCUS SYSTEM

摘要

A distance measuring system is provided for auto focusing a camera of an inspection system for inspecting a planar surface that is patterned. The system includes a pattern generator, an image sensor, an optical element(s) and a processor. The pattern generator projects a spatially random pattern toward the planar surface at an oblique angle. The optical element(s) forms the image of the reflected pattern on the image sensor and the image sensor captures an image of the spatially random pattern reflected off the planar surface. The processor processes the image of the spatially random pattern and provides auto-focus information.

主权项

1. A distance measuring system for auto focusing a camera of an inspection system for inspecting a planar surface that is patterned, the distance measuring system comprising:
a pattern generator that projects a spatially random pattern toward the planar surface at an oblique angle; an image sensor that captures an image of the spatially random pattern reflected off the planar surface; at least one optical element that forms the image of the reflected pattern on the image sensor; and a processor that processes the image of the spatially random pattern captured by the image sensor and provides auto-focus information.