发明名称 ELECTRIC FIELD TREATMENT METHOD AND ELECTRIC FIELD TREATMENT DEVICE
摘要 This electrolytic treatment device performs a prescribed treatment using ions to be treated that are contained in a treatment liquid, and comprises a direct electrode and a counter electrode which are arranged on either side of the treatment liquid, an indirect electrode which forms an electric field in the treatment liquid, and a switch which switches between connection of the indirect electrode to the power source and connection of the indirect electrode to the direct electrode or the counter electrode. The switch connects and applies a voltage across the intermediate electrode and the power source, and breaks the connection between the intermediate electrode and the power supply and connects the intermediate electrode to the direct electrode or the counter electrode.
申请公布号 WO2015104951(A9) 申请公布日期 2016.01.28
申请号 WO2014JP82969 申请日期 2014.12.12
申请人 TOKYO ELECTRON LIMITED 发明人 IWATSU, HARUO
分类号 C25D5/00;C25D17/10;C25F3/00 主分类号 C25D5/00
代理机构 代理人
主权项
地址