发明名称 STRAIN ENGINEERED MICROSTRUCTURES
摘要 The present invention generally relates to articles comprising microstructures and methods for forming microstructures. The microstructures may be mechanically coupled to impart complex three dimensional shapes. For example, one or more microstructures may be grown on a substrate at different average growth rates, resulting in curved microstructures.
申请公布号 US2016023904(A1) 申请公布日期 2016.01.28
申请号 US201414444845 申请日期 2014.07.28
申请人 Massachusetts Institute of Technology ;University of Michigan, The Board of Regents Acting For and On behalf of the C/O Technology Man 发明人 Hart Anastasios John;Park Sei Jin;Tawfick Sameh Hani;De Volder Michael FI
分类号 C01B31/02;C23C16/52 主分类号 C01B31/02
代理机构 代理人
主权项 1. An article, comprising: a substrate; a first microstructure adjacent the substrate; a second microstructure adjacent the first microstructure,wherein the first microstructure has a greater average density, greater average cross-sectional dimension, greater average growth rate, and/or different chemical composition than the second microstructure; and wherein the first structure has a appreciably non-zero tip angle relative to the vertical when measured at the distal end of the first microstructure.
地址 Cambridge MA US