发明名称 |
TARGET PREPARATION |
摘要 |
A method for coating workpieces includes the following steps: charging a coating chamber with the workpieces to be coated; closing and evacuating the coating chamber to a predetermined process pressure, starting a coating source, which comprises a target as a material source, whereby particles are accelerated from the surface of the target toward substrates, characterized in that until the target has been conditioned a shield is provided between the target surface and the substrate, wherein meanwhile the substrates to be coated are at least partially subjected to a pretreatment. |
申请公布号 |
SG11201510361Y(A) |
申请公布日期 |
2016.01.28 |
申请号 |
SG11201510361Y |
申请日期 |
2014.06.30 |
申请人 |
OERLIKON SURFACE SOLUTIONS AG, TRÜBBACH |
发明人 |
KURAPOV, DENIS;KRASSNITZER, SIEGFRIED |
分类号 |
C23C14/32;C23C14/02;C23C14/35;H01J37/34;H01L21/02 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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