发明名称 PROCESSING APPARATUS
摘要 A processing apparatus including a holding unit that holds a workpiece and a grinding unit that grinds the workpiece held by the holding unit is provided. The processing apparatus includes a gettering capability determining unit that determines whether or not grinding distortion generated by grinding the workpiece held by the holding unit by the grinding unit has sufficient gettering capability.
申请公布号 SG10201504537Y(A) 申请公布日期 2016.01.28
申请号 SG10201504537Y 申请日期 2015.06.09
申请人 DISCO CORPORATION 发明人 NAOYA SUKEGAWA;SEIJI HARADA
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