DEPOSITION OF DOPE ZnO FILM ON POLYMER SUBSTRATE BY UV-AIDED CHEMICAL VAPOR DEPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a high-quality TCO film on a polymer substrate at a low processing temperature, and a product obtained by the method.SOLUTION: There is provided a method for forming a layer on a polymer substrate including a step for bringing at least one precursor into contact with the polymer substrate, and a step for applying ultraviolet light to decompose the at least one precursor and deposit it on the polymer substrate. There is further provided a dope layer containing zinc oxide deposited on the polymer substrate. The dope layer is obtained by a step for introducing at least one precursor containing zinc and dopant into a container having the polymer substrate therein, and a step for applying ultraviolet light to decompose the at least one precursor and deposit a zinc-oxide-doped layer on the polymer substrate.