| 发明名称 |
ATOMIC FORCE MICROSCOPY OF SCANNING AND IMAGE PROCESSING |
| 摘要 |
Apparatus and associated method that contemplates performing a first atomic force microscope (AFM) scan of a first region of a sample centered at a first position at a first angle to produce a first scan image, the first AFM scan including a first component scan at a first speed and a second component scan at a second speed; performing a second AFM scan of the first region of the sample at a second angle to produce a second scan image, the second AFM scan including performing a third component scan at the first speed and a fourth component scan at the second speed; and correcting a first error in the first scan image based on the second scan image to produce a corrected image output. |
| 申请公布号 |
US2016025772(A1) |
申请公布日期 |
2016.01.28 |
| 申请号 |
US201514873839 |
申请日期 |
2015.10.02 |
| 申请人 |
SEAGATE TECHNOLOGY LLC |
发明人 |
Zhou Lin;Liu Huiwen;Egbert Dale;Nelson Jonathan A.;Zhu Jianxin |
| 分类号 |
G01Q40/00;G01Q30/06 |
主分类号 |
G01Q40/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method comprising:
performing a first atomic force microscope (AFM) scan of a first region of a sample centered at a first position at a first angle to produce a first scan image, the first AFM scan including a first component scan at a first speed and a second component scan at a second speed; performing a second AFM scan of the first region of the sample at a second angle to produce a second scan image, the second AFM scan including performing a third component scan at the first speed and a fourth component scan at the second speed; and correcting a first error in the first scan image based on the second scan image to produce a corrected image output. |
| 地址 |
Cupertino CA US |
