发明名称 UPPER COVER OPENING MECHANISM OF REACTION CHAMBER, AND REACTION CHAMBER
摘要 Provided are a reaction chamber and an upper cover opening mechanism thereof. The upper cover opening mechanism is located on one side of the reaction chamber (20) and comprises at least one driving unit (23). Each driving unit (23) comprises a first fixed member (230), a second fixed member (231), a first connection member (232), and a driving apparatus (233). The first fixed member (230) is fixed on the upper cover (22), and is hingedly connected to the first end of the first connection member (232). The driving apparatus (233) is hingedly connected to the second end of the first connection member (232). The second fixed member (231) is fixed to a cavity (21) of the reaction chamber (20), and is hingedly connected to the first connection member (232) between the first end and the second end of the first connection member (232).
申请公布号 WO2016011761(A1) 申请公布日期 2016.01.28
申请号 WO2014CN93105 申请日期 2014.12.05
申请人 BEIJING NMC CO., LTD. 发明人 ZHANG, PENG
分类号 F16J13/16;H01L21/67 主分类号 F16J13/16
代理机构 代理人
主权项
地址