| 摘要 |
PROBLEM TO BE SOLVED: To prevent enlargement of a power supply unit in a power supply apparatus 102 for managing a plurality of flow controllers 101.SOLUTION: The power supply apparatus includes a power supply control section 11, cabled to each of a plurality of flow controllers 101 for controlling a fluid flow, managing the operation of each of the flow controllers 101 through the cable 8 and supplying electric power thereto, shifts power supply start timing from those of at least parts of the flow controllers 101. |
