HIGH POWER FILTER WITH SINGLE ADJUST FOR MULTIPLE CHANNELS

摘要

A RF filter system for filtering radio frequency is provided. A first plurality of capacitors, said first plurality of capacitors comprising at least a first capacitor and a second capacitor is provided. A first conductor and second conductor are wound around a first core member to forma first inductor formed from the first conductor and a second inductor formed from the second conductor, a first end of said first conductor being connected to a first end of a first load and to a first end of said first capacitor, wherein a first end of said second conductor being connected to a second end of the first load and a second end of said second capacitor. A first variable component has a first end connected to ground and a second end connected to a second end of said first capacitor and a first end of said second capacitor.

主权项

1. A RF filter system for filtering radio frequency (RF) power transmitted from at least an electrostatic chuck (ESC) in a plasma processing system, said plasma processing system including at least a first load disposed at a first portion of said ESC, said plasma processing system further including at least a power supply, said RF filter system comprising:
a first core member; a first plurality of capacitors, said first plurality of capacitors comprising at least a first capacitor and a second capacitor; a first conductor; a second conductor, wherein first portions of the first conductor and second conductor are wound around and wound along at least a first portion of said first core member to form at least a first set of inductors comprising a first inductor formed from the first conductor and a second inductor formed from the second conductor, a first end of said first conductor being connected to a first end of said first load and to a first end of said first capacitor and a second end of said first conductor being electrically connected to said power supply, wherein a first end of said second conductor being connected to a second end of said first load and a second end of said second capacitor, and wherein a second end of said second conductor being electrically connected to said power supply; and a first variable component with a first end connected to ground, and a second end connected to a second end of said first capacitor and a first end of said second capacitor.