| 发明名称 |
DISPATCH CONTROL METHOD FOR FURNACE PROCESS |
| 摘要 |
A dispatch control method for a furnace process including the following steps is provided. Before a plurality of lots of wafers is loaded into a furnace, the characteristic variation value of each of the plurality of lots of wafers is calculated. The plurality of lots of wafers is ordered according to the size of the characteristic variation values. The plurality of lots of wafers is placed in the furnace in a descending order of the characteristic variation values corresponding to a plurality of locations in the furnace causing the characteristic variation values to change from smaller to larger. |
| 申请公布号 |
US2016025414(A1) |
申请公布日期 |
2016.01.28 |
| 申请号 |
US201414510122 |
申请日期 |
2014.10.09 |
| 申请人 |
Powerchip Technology Corporation |
发明人 |
Wu Jyun-Da;Hsiao Shih-Tsung;Chen Chien-Chung |
| 分类号 |
F27D19/00;G05B19/418 |
主分类号 |
F27D19/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A dispatch control method for a furnace process, comprising:
calculating a characteristic variation value of each of a plurality of lots of wafers before the plurality of lots of wafers is loaded into a furnace; ordering the plurality of lots of wafers according to a size of the characteristic variation values; and placing the plurality of lots of wafers in the furnace in a descending order of the characteristic variation values corresponding to a plurality of locations in the furnace causing the characteristic variation values to change from smaller to larger. |
| 地址 |
Hsinchu TW |
