| 摘要 |
PROBLEM TO BE SOLVED: To enhance end face strength of a substrate when dividing the brittle material substrate after scribing, while extending a life of a scribing wheel.SOLUTION: Scribing-wheel base material that has a central part of a side face of a disk periphery as the largest diameter is used, and a diamond film is formed on the side face by a CVD method. The central part of the side face is polished so that a plane including a circle defined by a ridge line becomes perpendicular to a central axis of a scribing wheel. This helps to reduce roughness of a ridge part. When scribing and dividing a brittle material substrate by using the scribing wheel, accuracy of an end face of the divided substrate increases and end face strength can be improved. Wear of the ridge part is small even proceeding scribing, and thus a life of the scribing wheel can be extended. |
