SILICON PHOTONIC CRYSTAL NANOBEAM CAVITY WITHOUT SURFACE CLADDING AND INTEGRATED WITH MICRO-HEATER FOR SENSING APPLICATIONS

摘要

A silicon photonic crystal nanobeam cavity device is described, including a heater that can set a desired temperature on the cavity device in order to control its resonant wavelength. The device has no cladding, which is advantageous for sensing. Biosensing applications with temperature control can be carried out with the nanobeam cavity device.

主权项

1. A device comprising:
a photonic crystal nanobeam cavity; a microheater configured to heat the photonic crystal nanobeam cavity; and at least two electrodes electrically connected to the microheater and configured to provide current to the microheater.