发明名称 |
AEROSOL COATING METHOD AND PLASMA-RESISTANT MEMBER FORMED THEREBY |
摘要 |
According to an aerosol coating method, a heat treatment process of preliminary ceramic particles having a first mean particle size (D50) is performed to form ceramic particles having a second mean particle size (D50) in micro unit larger than the first mean particle size. Thereafter, the ceramic particles are mixed with a carrier gas to form an aerosol. The aerosol is sprayed toward the base to form a ceramic coating film on the base. |
申请公布号 |
SG11201510335Q(A) |
申请公布日期 |
2016.01.28 |
申请号 |
SG11201510335Q |
申请日期 |
2013.08.28 |
申请人 |
KOMICO CO., LTD. |
发明人 |
YI, SUNG HWAN;JUNG, JAE HYUN;JANG, KYEONG IK;YE, KYOUNG HWAN |
分类号 |
C23C24/04;C23C24/08 |
主分类号 |
C23C24/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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