GALLIUM OXIDE SUBSTRATE, AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To provide a gallium oxide substrate manufacturing method capable of acquiring a gallium oxide substrate from an ingot of a gallium oxide single crystal while suppressing the occurrence of a defect, and a gallium oxide substrate having a structure capable of suppressing the occurrence of a defect when processing.SOLUTION: In one mode of embodiment, a gallium oxide substrate manufacturing method comprises: the step of cutting out a columnar block 20 of a gallium oxide single crystal having a section parallel to a radial direction different from a (100) plane, from an ingot 2 of the gallium oxide single crystal by a wire discharge working; and the step of slicing the columnar block 20 to acquire a gallium oxide substrate 30.