| 摘要 |
PROBLEM TO BE SOLVED: To disclose a drive section of an XY table including a ferromagnetic U-shaped yoke (1) at a fixed position having a first arm part (1.1) and a second arm part (1.2) in one plane (XY), and a movable ferromagnetic rod (2), where the yoke (1) and rod (2) guide a magnetic circuit, and its magnetic flux (Φ) passes through a track traversing a cavity between these arm parts (1.1, 1.2) and the rod (2), thus generating a magnetic resistance force there in the vertical direction counteracting the gravity of the rod (2), and to disclose an XY table having such a drive section, and an independent drive section for inverting the direction of movement (X) of the table (6).SOLUTION: This rod (2) is in parallel with a plane (XY) defined by these arm parts (1.1, 1.2), and provided under that plane. |
