| 发明名称 |
METHODS OF MANUFACTURING ABRASIVE PARTICLE AND POLISHING SLURRY |
| 摘要 |
Provided is a method of manufacturing an abrasive particle including a mother particle and a plurality of auxiliary particles formed on a surface of the mother particle, and a method of manufacturing a polishing slurry in which the abrasive particle is mixed with a polishing accelerating agent and a pH adjusting agent. |
| 申请公布号 |
US2016024350(A1) |
申请公布日期 |
2016.01.28 |
| 申请号 |
US201514874379 |
申请日期 |
2015.10.02 |
| 申请人 |
UBMATERIALS INC. |
发明人 |
JUNG Seung Won |
| 分类号 |
C09G1/02;C09K3/14 |
主分类号 |
C09G1/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of manufacturing a polishing slurry polishing a workpiece, wherein an abrasive particle which polishes the workpiece and has a plurality of protrusions protruded outward is dispersed in a dispersing agent. |
| 地址 |
Yongin-Si KR |
