EVAPORATION COATING APPARATUS

摘要

Disclosed is an evaporation coating apparatus. The evaporation coating apparatus comprises a heating body (3) and a cylindrical body (1) located in the heating body (3). The cylindrical body (1) comprises a hollow sleeve (13) and a barrel body (12) sleeved in the hollow sleeve (13) in a fitted manner. A groove (1') is formed in the surface of the barrel body (12). The groove (1') extends along the center line of the axial direction of the barrel body (12), and multiple compartments (11) are disposed in the groove (1') at intervals. First evaporation holes (131) are formed in the top end area of the hollow sleeve (13). Each compartment (11) is provided with a crucible (2). The crucible (2) comprises a body (21) that is sealed completely except for an open end, and comprises a cover (22) that is connected to the body (21) in a fitted manner. The bodies (21) are located in the compartments (11). Second evaporation holes (221) corresponding to the first evaporation holes (131) are formed in the covers (22). An internal heating wire (4) is disposed on the outer surface of the hollow sleeve (13). The internal heating wire (4) is connected to a control unit. The heating body (3) is a hollow cylindrical structure. An external heating wire (5) and nozzles (31) corresponding to the first evaporation holes (131) are disposed on the outer surface of the heating body (3). The present invention is mainly used for manufacturing a large-size display, and can improve the filming uniformity of an organic material on the surface of a substrate.