发明名称 RETAINER, METHOD FOR PRODUCING SAME AND USE THEREOF
摘要 A retainer has a coating composed of silicon carbide, glassy carbon or pyrolytic carbon on its surface. A method for producing the retainer and the use of the retainer in a plasma-driven vapor deposition are also provided.
申请公布号 SG11201509964U(A) 申请公布日期 2016.01.28
申请号 SG11201509964U 申请日期 2014.06.05
申请人 CENTROTHERM PHOTOVOLTAICS AG 发明人 VÖLK, HANS-PETER;PIECHULLA, ALEXANDER;WALK, ULRICH;FUCHS, JENS-UWE;ZERNICKEL, DIETER
分类号 H01L21/687 主分类号 H01L21/687
代理机构 代理人
主权项
地址
您可能感兴趣的专利