SURFACE DEFECT INSPECTION APPARATUS

摘要

The present invention relates to a surface defect inspection device and, more specifically, relates to a surface defect inspection device capable of inspecting defects such as particles attached to an inner surface of an object to be inspected having an inner surface such as a pellicle frame. According to the present invention, the surface defect inspection device comprises: a first image acquisition unit obliquely arranged with respect to an object to be inspected to acquire an image on an inner surface of the object; and a transfer unit to relatively move the object with respect to the first image acquisition unit such that the inner surface of the object having a flat part and a curved part is able to face the first image acquisition unit in a state where the inner surface is separated from the first image acquisition unit at a predetermined distance. The first image acquisition unit comprises: a photodetector array; and a lens arranged between the object and the photodetector array. A central axis of the photodetector array is inclined at a predetermined angle to a central axis of the lens. According to the present invention, the surface defect inspection device maintains the predetermined distance between the inner surface of the object and the image acquisition unit even when inspecting an inner surface of a rounded corner, and acquires the image on the inner surface of the object in a state where the inner surface faces the image acquisition unit. As such, the present invention precisely inspects the defects of the inner surface of the rounded corners.