| 摘要 |
FIELD: physics.SUBSTANCE: apparatus for preparing multicomponent control gas mixtures (CGM) includes cylinders, valves, gas pressure regulators, pulse tubes and a mixing chamber. The cylinders, the number of which and the content of a single-component CGM in each of which are selected based on the required composition of the multicomponent CGM to be prepared, are connected in parallel to a suction device through the pulse tubes. The pulse tubes are fitted with gas pressure regulators. The suction device is connected through a pulse tube to the mixing chamber, which is connected to a system for controlling and feeding a multicomponent CGM, consisting of a gas pressure regulator and a rotameter.EFFECT: wider range of equipment.1 dwg |
