发明名称 |
DEVICE FOR PROTECTING AN ELECTRODE SEAL IN A REACTOR FOR THE DEPOSITION OF POLYCRYSTALLINE SILICON |
摘要 |
Electrode support seals in a Siemens reactor for the deposition of polycrystalline silicon are protected against thermal stress and degradation, and shorting by falling fragments is prevented by shielding having a high resistivity and also a high thermal conductivity. |
申请公布号 |
EP2976152(A1) |
申请公布日期 |
2016.01.27 |
申请号 |
EP20140706636 |
申请日期 |
2014.02.26 |
申请人 |
WACKER CHEMIE AG |
发明人 |
KRAUS, HEINZ;HEGEN, ANDREAS;KUTZA, CHRISTIAN |
分类号 |
B01J15/00;C01B33/035;H01J37/32 |
主分类号 |
B01J15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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