<p>In a optical sensor (30) for measuring object surfaces (2) with high precision, measuring errors due to tilt of an object surface can be corrected by using a pupil monitor (72), which senses the intensity distribution of the reflected measuring beam (b') in combination with a correction/ calibration table (76) and use the monitor signal to correct the primary measuring signal (FES) of the sensor. Especially for a differential confocal sensor, a further order of correction can be obtained by determining optimum position and diameter of the pinholes.</p>
申请公布号
EP2150770(B1)
申请公布日期
2016.01.27
申请号
EP20080753777
申请日期
2008.05.16
申请人
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO;WIMOPTIK B.V.;AC OPTOMECHANIX
发明人
VAN AMSTEL, WILLEM DIRK;CACACE, LEONARD ANTONINO;HENSELMANS, RENS